Evaluation of different rectangular scan strategies for HRSTEM imaging

Abstract

Scanning transmission electron microscopes (STEMs) equipped with spherical aberration correctors are well known for their ability to obtain images with atomic scale information. The conventional ‘raster’ method scans the probe over the sample line by line. HRSTEM (High resolution STEM) imaging is typically performed by scanning a focused electron probe over a sample at sub-Ångstrom resolution. At such high resolution images, distortions are commonly present because of drift of the sample/stage during raster scanning, predominantly affecting the so-called ‘slow scan direction’ [1].