Surface Figure Metrology during highly Automated Fabrication of Microoptics

Abstract

Optics fabrication has many common aspects independent from size and shape, but some aspects of microoptics are special. Microoptics means : ☺ small dimensions ☺ little removed material ☺ fast grinding ☺ fast polishing ☺ low weight ☺ difficult to test These properties call for automation of the production process.