Integrated optical waveguides for electrooptical PCB

M. Siesicki, K. Nieweglowski, K. Wolter, S. Patela
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引用次数: 2

Abstract

In this paper a novel method for design, development and fabrication of low attenuation waveguides is describe in details. Different sol-gel materials and coating methods are presented. The most critical processing step by manufacturing of integrated interconnects is a coating of a lower cladding on structured copper surfaces. Therefore a suitable material and coating method was founded, which enable realizing of cladding layer with required parameters. For evaluation of fabricated waveguides the attenuation measurement was used.
光电PCB集成光波导
本文详细介绍了一种设计、研制和制造低衰减波导的新方法。介绍了不同的溶胶-凝胶材料和涂层方法。制造集成互连最关键的加工步骤是在结构铜表面涂覆较低的包层。从而找到了合适的材料和包覆方法,实现了包覆层的参数要求。对制作的波导进行了衰减测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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