A low-distortion, low-loss varactor phase-shifter based on a silicon-on-glass technology

Abstract

A varactor-tuned continuously variable phase shifter based on an all-pass network is presented. Design equations for this phase shifter network are derived and presented. The phase shifter achieves an IIP3 of 52 dBm with 10 MHz tone-spacing at 2 GHz and loss of 2.3-3.7 dB with continuous 180deg phase shift at 2 GHz. The total chip size including pads is 2900 mum X 2200 mum.