{"title":"[Technical monitoring of air pollutants in production of integrated circuits. Monitoring strategy and results].","authors":"B Ponsold, H Kath","doi":"","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":76839,"journal":{"name":"Zeitschrift fur die gesamte Hygiene und ihre Grenzgebiete","volume":"37 2","pages":"58-63"},"PeriodicalIF":0.0000,"publicationDate":"1991-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Zeitschrift fur die gesamte Hygiene und ihre Grenzgebiete","FirstCategoryId":"1085","ListUrlMain":"","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}