S.T. Han, J. So, K. Jang, Y. Shin, S. Jeon, J.H. Kim, S.S. Chang, N. Ryskin, G. Park
{"title":"Experimental investigations for micro-fabricated folded-waveguide traveling-wave tube oscillators","authors":"S.T. Han, J. So, K. Jang, Y. Shin, S. Jeon, J.H. Kim, S.S. Chang, N. Ryskin, G. Park","doi":"10.1109/IVNC.2004.1354928","DOIUrl":null,"url":null,"abstract":"Vacuum tube (folded-waveguide traveling-wave tube oscillator) fabricated by LIGA (deep X-ray lithography: Lithographic, Galvanoformung, Abformung; German acronym) process was successfully developed for the first time.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVNC.2004.1354928","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Vacuum tube (folded-waveguide traveling-wave tube oscillator) fabricated by LIGA (deep X-ray lithography: Lithographic, Galvanoformung, Abformung; German acronym) process was successfully developed for the first time.