Analysis of photoluminescence in TiO2 matrix doped with Eu and Nd

Abstract

This work presents the analysis of photoluminescence effect in TiO2 matrix doped with Eu and Nd. Thin films were prepared by high energy reactive magnetron sputtering (HE RMS) method using metallic Ti-Eu and Ti-Nd mosaic targets and deposited on Si and SiO2. After deposition selected films were additionally annealed in an air ambient at 400degC and 600degC. The results of photoluminescence (PL) and optical transmission measurements were analyzed and their correlation with microstructure was described.