Zhe Zhang, Qiushi Huang, R. Qi, Jiaqi Chen, Feng Qinxu, Yufei Feng, Hongjun Zhou, T. Huo, Zhanshan Wang
{"title":"Narrowband Mg/SiC Multilayers Working around 30.4 nm","authors":"Zhe Zhang, Qiushi Huang, R. Qi, Jiaqi Chen, Feng Qinxu, Yufei Feng, Hongjun Zhou, T. Huo, Zhanshan Wang","doi":"10.1364/OIC.2019.FB.4","DOIUrl":null,"url":null,"abstract":"Narrowband Mg/SiC multilayer mirrors working around 30.4 nm with a significantly reduced bandwidth (FWHM ≈ 0.7 nm) basing on high order reflection have been designed and fabricated by direct-current (DC) magnetron sputtering.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.FB.4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
Narrowband Mg/SiC multilayer mirrors working around 30.4 nm with a significantly reduced bandwidth (FWHM ≈ 0.7 nm) basing on high order reflection have been designed and fabricated by direct-current (DC) magnetron sputtering.
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