Direct bonding of YIG film on Si without intermediate layer

K. Pantzas, G. Patriarche, A. Talneau, J. Ben Youssef
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Abstract

Direct bonding of Yttrium Iron Garnet on Si without any intermediate layer is demonstrated and characterized using Scanning Transmission Electron Microscopy. Such geometry of the hybrid stack with no layer in between the magneto-optic garnet film and the Si guiding layer opens the route for highly efficient hybrid isolators.
无中间层的YIG薄膜在Si上的直接键合
用扫描透射电子显微镜研究了钇铁石榴石在硅上的直接键合过程,并对其进行了表征。这种在磁光石榴石薄膜和硅导层之间没有层的混合堆的几何形状为高效的混合隔离器开辟了道路。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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