Calibration of Low Temperature Cable-Less Lightpipe Pyrometer on the NIST PEB Test Bed Between 50 °C and 230 °C

Abstract

The advent of the cable-less lightpipe radiation thermometer (CLRT) has resulted in a significant improvement in the accuracy of CLRT calibrations and measurements. CLRT systems show great promise in noncontact measurements by the elimination of the uncertainties caused by the long fiber optic cables and their connections and by the extension of the spectral range to handle low temperature applications down to ambient conditions. Calibration of the CLRT at the National Institute of Standards and Technology (NIST) is performed with the water heat pipe blackbody source between 50 degC and 230 degC. In addition, the CLRT is compared to contact thermometers on a silicon wafer heated in a post-exposure bake test bed at NIST. Comparison of the CLRT with both the blackbody and thermocouple standards provide confidence in using CLRTs and allow researchers to continued research in improving the accuracy and feasibility of applying CLRTs in semiconductor processing