A new excimer lamp model of Institute of High Current Electronics

Abstract

A new models of Xe2-excilamp (with maximum of radiation spectra at 172 nm) developed in Optical Radiation Laboratory of High Current Electronics Institute are presented. The task of creating a lamp with the most simple design embodiment was solved. The bulb of such an excilamp was made from a single quartz tube with a diameter of 22 mm and a length of 12 cm. The length of the discharge region was 4 cm. The lamp was supplied with voltage pulses from a generator of 2 μs with a repetition frequency up to 100 kHz. A radiant exitance of 3.5 mW/cm2 has been obtained. This value has not changed after 2400 hours of excilamp operation. The report will also describe other designs of Xe2-excilamps.