N. Zikrillayev, M. M. Shoabdurahimova, T. Kamilov, A. Z. Khusanov, K. K. Kurbonaliev, N. Norkulov, E. Saitov
{"title":"Obtaining manganese silicide films on a silicon substrate by the diffusion method","authors":"N. Zikrillayev, M. M. Shoabdurahimova, T. Kamilov, A. Z. Khusanov, K. K. Kurbonaliev, N. Norkulov, E. Saitov","doi":"10.26577/phst.2022.v9.i2.011","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":321102,"journal":{"name":"Physical Sciences and Technology","volume":"26 7","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physical Sciences and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.26577/phst.2022.v9.i2.011","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}