{"title":"Analysis on the microstructure of grating mechanical scored Aluminum film and mechanical properties","authors":"Baoqing Zhang, G. Shi, G. Shi","doi":"10.1109/3M-NANO.2012.6472961","DOIUrl":null,"url":null,"abstract":"At present time, grating mechanical scoring manufacture is process that diamond score reciprocates on the Aluminum film which is vacuum coating on the Chrome, glass and other substrates. As the structure and properties of stream Aluminum film affect the quality of groove greatly and are limited by the vacuum steam process, it is difficult to control and test the microstructure and mechanical properties of the film. In this paper, we recommend the new method that combine X-ray diffraction \"nondestructive\" test and nanopress-scratch testing technology. We can calculate the micro-structure, the aluminum film thickness and residual stress, analysis on the mechanical properties such as elastic modulus, hardness and stress-strain curve in this method in order to unveil the microstructure and mechanical properties of the aluminum film. Provide a feasible method for studying the microstructure and mechanical properties of the film and valuable reference and guidance on grating mechanical technology.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"357 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2012.6472961","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
At present time, grating mechanical scoring manufacture is process that diamond score reciprocates on the Aluminum film which is vacuum coating on the Chrome, glass and other substrates. As the structure and properties of stream Aluminum film affect the quality of groove greatly and are limited by the vacuum steam process, it is difficult to control and test the microstructure and mechanical properties of the film. In this paper, we recommend the new method that combine X-ray diffraction "nondestructive" test and nanopress-scratch testing technology. We can calculate the micro-structure, the aluminum film thickness and residual stress, analysis on the mechanical properties such as elastic modulus, hardness and stress-strain curve in this method in order to unveil the microstructure and mechanical properties of the aluminum film. Provide a feasible method for studying the microstructure and mechanical properties of the film and valuable reference and guidance on grating mechanical technology.