Analysis and Fabrication of Periodic Graphene-like Structures with Zinc Oxide Piezoelectric Material

Abstract

This study conducted simulation analysis and experiments on novel piezoelectric acoustic wave components, using finite element analysis software to explore the dispersion relation of piezoelectric components with various periodic structures, shapes, and thicknesses. A microelectromechanical system was employed to etch micropatterns onto films. This study developed four different piezoelectric structures, namely flat, periodic, and single-and dual-defect structures, and measured the frequency response variations in radio frequency and phase signals. The acoustic wave responses of a graphene-like structure with defect distribution were analyzed to develop, design, and fabricate a novel oscillator component. In addition to exploring the bandgap effect in the graphene-like structure model, this study also developed a frequency sweep model for the design of novel oscillating components.