Process Cost and Time in Minimal Fab to Fabricate Custom-made Microneedle Array with Extraction Tool

S. Khumpuang, Hiroyuki Tanaka, N. Umeyama, S. Hara
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Abstract

This work presents, for the first time, the study of fabrication time together with running cost of a microneedle array fabricated using minimal fab. A Si hollow-microneedle array was fabricated on a half inch wafer within 7 hours and its process cost was less than $10/chip although the process was only one chip production. A portable and disposable dropper is simply produced and assembled with microneedle array for the application of liquid extraction that may extend to be used as a blood extraction tool. The extracted liquid by one finger-push and release, up to 0.8 ml of liquid can be drawn and store in the dropper.
用萃取工具在最小晶圆厂制造定制微针阵列的工艺成本和时间
本文首次提出了利用最小晶圆厂制造微针阵列的制造时间和运行成本的研究。在7小时内,在半英寸晶圆上制作出了硅空心微针阵列,虽然该工艺仅生产一个芯片,但其工艺成本低于10美元/片。简单地生产了一种便携式一次性滴管,并与微针阵列组装在一起,用于液体提取,可扩展为血液提取工具。提取液一指推放,最多可抽出0.8 ml的液体并储存在滴管中。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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