{"title":"Design, Implementation, and Verification of a CMOS-Integrated Chemical Sensor System","authors":"Steven M. Martin, T. D. Strong, Richard B. Brown","doi":"10.1109/ICMENS.2004.49","DOIUrl":null,"url":null,"abstract":"Single-chip chemical microinstruments offer many benefits over bench-top laboratory equipment. This work presents the design, implementation, and verification of a CMOS-integrated microinstrument including voltammetric sensors and electronic interface on a single silicon substrate. Both component and system design parameters are detailed. Mixed-domain models of the system which can be simulated in a standard CAD environment are generated and used for system optimization. The integrated device was implemented by post-processing sensor structures on top of AMIS-fabricated, 0.5 µm CMOS electronics. Fabrication details are discussed and experimental device characteristics including functionality and lifetime testing are presented. The completed device has an active area of 0.6mm² with sensors sites measuring 64 µm². It operates from a 3V supply and consumes 1.6mW","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"122 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2004.49","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12
Abstract
Single-chip chemical microinstruments offer many benefits over bench-top laboratory equipment. This work presents the design, implementation, and verification of a CMOS-integrated microinstrument including voltammetric sensors and electronic interface on a single silicon substrate. Both component and system design parameters are detailed. Mixed-domain models of the system which can be simulated in a standard CAD environment are generated and used for system optimization. The integrated device was implemented by post-processing sensor structures on top of AMIS-fabricated, 0.5 µm CMOS electronics. Fabrication details are discussed and experimental device characteristics including functionality and lifetime testing are presented. The completed device has an active area of 0.6mm² with sensors sites measuring 64 µm². It operates from a 3V supply and consumes 1.6mW