Reliability study of digital silicon photonic MEMS switches

2015 IEEE 12th International Conference on Group IV Photonics (GFP) Pub Date : 2015-10-26 DOI:10.1109/GROUP4.2015.7305908

T. J. Seok, N. Quack, Sangyoon Han, Wencong Zhang, R. Muller, Ming C. Wu

引用次数: 8

Abstract

We report on the reliability test of 50×50 digital silicon photonic MEMS switches. The switch operates reliably over 10 billion cycles and up to 48 hours of continuous contact in ambient environment without packaging.

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数字硅光子MEMS开关可靠性研究

本文报道了50×50数字硅光子MEMS开关的可靠性测试。该开关可靠地运行超过100亿次循环，在无包装的环境中连续接触长达48小时。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2015 IEEE 12th International Conference on Group IV Photonics (GFP)

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