Comparison of Laser Raman Measurements and Fluid Dynamic Calculations in the Characterization of Atmospheric Pressure CVD Flow Reactor

W. V. Von Drasek, B. Jurcik, G. Jursich
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Abstract

Gas flow dynamic information is obtained on an atmospheric pressure flow reactor. Density spatial profiles have been both predicted by modeling and measured experimentally using spontaneous Raman spectroscopy.
激光拉曼测量与流体动力学计算在常压CVD流动反应器表征中的比较
在常压流动反应器上获得了气体流动的动态信息。利用自发拉曼光谱对密度空间分布进行了预测和实验测量。
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