{"title":"Using Petri Nets in Capacitive Microaccelerometers Design","authors":"R. Zaharyuk, V. Teslyuk, V. Karkulyovskyy","doi":"10.1109/MEMSTECH.2007.4283451","DOIUrl":null,"url":null,"abstract":"Proposes the use of Petri nets during computer-aided design of microaccelerometers on the system level and presents an example of using Petri nets for inter-digital microaccelerometers.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSTECH.2007.4283451","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Proposes the use of Petri nets during computer-aided design of microaccelerometers on the system level and presents an example of using Petri nets for inter-digital microaccelerometers.