Vertical interconnect in multilayer applications using Ormet/sup R/ conductive composites

C. Gallagher, G. Matijasevic, P. Gandhi, D. Pommer, S. Sargeant, R. Kumar, D. Neuburger
{"title":"Vertical interconnect in multilayer applications using Ormet/sup R/ conductive composites","authors":"C. Gallagher, G. Matijasevic, P. Gandhi, D. Pommer, S. Sargeant, R. Kumar, D. Neuburger","doi":"10.1109/ISAPM.1997.581249","DOIUrl":null,"url":null,"abstract":"Lamination of circuit layer pairs for multilayer constructions requires an innovative strategy for vertical interconnect in order to achieve high density. Multilayer circuits can be achieved by laminating circuit pairs with the use of an appropriate dielectric bond-ply. Circuit pairs are made of a high performance material with predrilled and plated vias and a pair of copper layers for defining circuitry. Vertical interconnect has been achieved by integrating patterned conductive vias with the bond-ply. The patterning of the bond-ply is achieved using a high speed lasing system. The conductive material interconnection can be made in several ways including patterning directly onto the circuit as well as filling the lased holes in the bond-ply. This presentation will discuss the results of work done using a conductive ink material for vertical interconnect. This organic-metallic (Ormet/sup R/) composite, which is based on transient liquid phase sintering, is used to make a connection between the two pads by alloying with the pad metallization. The partially sintered network also extends through the via interconnect providing a reliable network for electrical conduction. Six layer structures composed of three circuit layer pairs and two via interconnect layers have been manufactured. Good electrical connection has been achieved by connecting 5 mil pads vertically. Cross-sectional examination demonstrates a continuous metal network. Preliminary reliability testing indicates that the connections are electrically and mechanically robust.","PeriodicalId":248825,"journal":{"name":"Proceedings 3rd International Symposium on Advanced Packaging Materials Processes, Properties and Interfaces","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-03-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings 3rd International Symposium on Advanced Packaging Materials Processes, Properties and Interfaces","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAPM.1997.581249","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

Abstract

Lamination of circuit layer pairs for multilayer constructions requires an innovative strategy for vertical interconnect in order to achieve high density. Multilayer circuits can be achieved by laminating circuit pairs with the use of an appropriate dielectric bond-ply. Circuit pairs are made of a high performance material with predrilled and plated vias and a pair of copper layers for defining circuitry. Vertical interconnect has been achieved by integrating patterned conductive vias with the bond-ply. The patterning of the bond-ply is achieved using a high speed lasing system. The conductive material interconnection can be made in several ways including patterning directly onto the circuit as well as filling the lased holes in the bond-ply. This presentation will discuss the results of work done using a conductive ink material for vertical interconnect. This organic-metallic (Ormet/sup R/) composite, which is based on transient liquid phase sintering, is used to make a connection between the two pads by alloying with the pad metallization. The partially sintered network also extends through the via interconnect providing a reliable network for electrical conduction. Six layer structures composed of three circuit layer pairs and two via interconnect layers have been manufactured. Good electrical connection has been achieved by connecting 5 mil pads vertically. Cross-sectional examination demonstrates a continuous metal network. Preliminary reliability testing indicates that the connections are electrically and mechanically robust.
使用Ormet/sup /导电复合材料的多层应用中的垂直互连
多层结构的电路层对叠层需要创新的垂直互连策略以实现高密度。多层电路可以通过使用适当的介电键合层压电路对来实现。电路对由高性能材料制成,带有预钻和镀孔以及一对用于定义电路的铜层。垂直互连是通过将有图案的导电过孔与键合层集成而实现的。结合层的图案化是使用高速激光系统实现的。导电材料互连可以以几种方式制成,包括直接在电路上进行图案绘制以及填充键合层中的激光孔。本报告将讨论使用导电油墨材料进行垂直互连的工作结果。这种基于瞬态液相烧结的有机-金属(Ormet/sup / R/)复合材料通过与焊盘金属化合金化来连接两个焊盘。部分烧结的网络也通过通孔互连延伸,为导电提供可靠的网络。制造了由三个电路层对和两个通孔互连层组成的六层结构。通过垂直连接5个密垫,实现了良好的电气连接。横断面检查显示一个连续的金属网。初步的可靠性测试表明,连接在电气和机械上都很坚固。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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