A compact serial RF MEMS switch for S-band application

2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) Pub Date : 2001-10-22 DOI:10.1109/ICSICT.2001.981999

H. Xiaodong, Lumiao, Hou Maohui, He Qingguo, Gao Cuizhuo, Bai Xiwei, Zhao Zhengping

引用次数: 1

Abstract

This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB insertion loss was demonstrated in a HP 85 10A vector Network Analyzer while mounted on a rf carrier.

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一个紧凑的串行射频MEMS开关s波段应用

本文综述了射频开关MEMS技术的最新进展。以s波段应用为背景，设计、制作和测试了几种结构。在这些结构中，详细介绍了一种紧凑的串行开关。在安装在射频载波上的HP 85 10A矢量网络分析仪中，演示了21.0 dB隔离和0.5 dB插入损耗的性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443)

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