Single Mode Polymer Optical Waveguides and Out-ofplane Coupling Structure on a Glass Substrate

Abstract

In this paper, we propose an approach to improve silicon photonics-based optical transceivers packaging capabilities thanks to an optical and electrical interposer. We demonstrate the fabrication of polymer optical waveguides, single mode at telecom wavelengths using photosensitive resists and ultra-violet (UV) laser lithography on a glass substrate. Alongside the waveguides, a total internal reflection (TIR) based mirror is integrated for vertical redirection of the optical signal toward the silicon photonic integrated circuit (PIC). Femtosecond laser ablation is used for the mirror fabrication. Both the waveguides and the mirror have been optically characterized at 1310 nm. Total propagation losses of the waveguides have been measured at 5.5 dB for a 24.7 mm long waveguide. The mirrors present a circular distribution of the EM field.