Design and Fabrication of SiN-Si Dual-Layer Optical Phased Array Chip

2019 Asia Communications and Photonics Conference (ACP) Pub Date : 2019-11-01 DOI:10.1364/prj.387376

Pengfei Wang, Guangzhen Luo, Yang Xu, Yajie Li, Yanmei Su, Jianbin Ma, Ruiting Wang, Zhengxia Yang, Xuliang Zhou, Yejin Zhang, Jiao-qing Pan

引用次数: 28

Abstract

A 64-channel SiN-Si dual-layer optical phased array (OPA) chip is designed and fabricated. It combines the low loss of SiN with the excellent modulation performance of Si, which improves the performance of Si single-layer OPA.

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辛硅双层光学相控阵芯片的设计与制造

设计并制作了64通道SiN-Si双层光学相控阵(OPA)芯片。它结合了SiN的低损耗和Si优异的调制性能，提高了Si单层OPA的性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2019 Asia Communications and Photonics Conference (ACP)

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