Modelling of planar linear motor for microelectronic equipment

Nanodesign, Technology, and Computer Simulations Pub Date : 2008-07-11 DOI:10.1117/12.837088

V. V. Jarski

引用次数: 0

Abstract

The subject of this article is the modelling of planar linear motor, using the characteristic calculation module from MATLAB/Simulink and the visualization module developed in Macromedia FLASH MX6. The mathematical model was presented, and the visualization program was described. The simulation results were showed.

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微电子设备平面直线电机建模

本文的主题是平面直线电机的建模，利用MATLAB/Simulink中的特性计算模块和Macromedia FLASH MX6中开发的可视化模块。给出了数学模型，并给出了可视化程序。给出了仿真结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nanodesign, Technology, and Computer Simulations

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