Self-organized growth of Si/Si and Ge/sub x/Si/sub 1-x//Si superlattices

Abstract

Si/Si and Ge/sub x/Si/sub 1-x//Si superlattices were grown by vapour-transport reactions. Au and Pt were used to initiate self-organized growth of different "brushes". A low of distribution and shape of growth peculiarities has been studied by electron microscopy.