Study on fast manufacturing technology for high precision aspherical optics

International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) Pub Date : 2021-12-13 DOI:10.1117/12.2604549

Bin Xuan, Linchao Zhang

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引用次数: 1

Abstract

With the developments of optical design, testing and manufacturing technology, aspherical optics are applied more often. However, high precision aspherical optics are not widely used in many fields due to the high cost of manufacturing. In order to reduce the cost, an approach to realize the fast manufacturing of high precision aspherical optics is proposed. The bonnet polishing, computer controlled optical surfacing (CCOS) and magnetorheological finishing (MRF) are utilized in combination during the manufacturing process. Firstly, the rough polishing of the aspherical optics is accomplished by bonnet polishing. Secondly, the surface error are smoothed to reduce mid-frequency surface error by CCOS smoothing polishing equipment. Finally, the deterministic manufacturing is carried out by MRF equipment. The fast manufacturing technology has been applied on a paraboloidal mirror of 237mm in diameter. The experimental results show that aspherical optics can reach λ /60 (rms, @λ =632.8nm) in 33 hours by using the combined manufacturing technology. The fast manufacturing technology can provide high precision and high efficiency for aspherical optics.

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高精度非球面光学元件快速制造技术研究

随着光学设计、检测和制造技术的发展，非球面光学的应用越来越广泛。然而，由于制造成本高，高精度非球面光学系统在许多领域没有得到广泛应用。为了降低成本，提出了一种实现高精度非球面光学元件快速制造的方法。在制造过程中，将阀盖抛光、计算机控制光学表面处理(CCOS)和磁流变表面处理(MRF)相结合。首先，采用阀盖抛光法完成非球面光学元件的粗抛光。其次，利用CCOS光滑抛光设备对表面误差进行光滑处理，减小中频表面误差;最后，利用MRF设备进行确定性制造。将快速制造技术应用于直径为237mm的抛物面镜上。实验结果表明，采用复合制造技术，非球面光学在33小时内可达到λ /60(均方根，@λ =632.8nm)。快速制造技术可以为非球面光学提供高精度和高效率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)

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