A MEMS reconfigurable metamaterial for terahertz filter applications

2014 8th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics Pub Date : 2014-11-06 DOI:10.1109/METAMATERIALS.2014.6948554

Zhengli Han, K. Kohno, Tapio Makela, T. Haatainen, H. Fujita, K. Hirakawa, H. Toshiyoshi

引用次数: 5

Abstract

We propose and demonstrate a tunable terahertz band stop filter by using metamaterial with a reconfiguring RF-MEMS (radio frequency - micro electro mechanical systems) capacitor within the split-ring resonator (SRR) based on electrostatic actuation. The device is compatible with the surface micromachining process.

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一种用于太赫兹滤波器的MEMS可重构超材料

我们提出并演示了一种可调谐的太赫兹带阻滤波器，该滤波器使用超材料，并在基于静电驱动的分环谐振器(SRR)内重新配置RF-MEMS(射频-微机电系统)电容器。该装置与表面微加工工艺相适应。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2014 8th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics

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