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Feasibility of nanometer-thickness molybdenum carbide film for extreme ultraviolet lithography pellicle

International Conference on Extreme Ultraviolet Lithography 2022 Pub Date : 2022-11-11 DOI:10.1117/12.2643003
Yongkyun Kim, Kihun Seong, Donggi Lee, Seungchan Moon, Hyun-Mi Kim, Hyeongkeun Kim, Seul-Gi Kim, Jinho Ahn
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International Conference on Extreme Ultraviolet Lithography 2022
International Conference on Extreme Ultraviolet Lithography 2022
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