Use of Protek-PSB as structural material for MEMS: Measurement of elastic modulus

Abstract

Protek-PSB is a polymer spin-on coating designed to replace silicon oxide and silicon nitride as hard mask in bulk wet anisotropic etch of silicon. The possibility of application of this material as structural material joins the benefits of low cost fabrication using wet etch with the polymer low cost and mechanical properties. To better evaluate the applicability of this material, we measured the elastic modulus of Protek-PSB coatings using the beam bending method with cantilevered beams of Protek-PSB. We found that the elastic modulus of this material is estimated in 3,10 ± 0,47 GPa, compatible with other polymeric coatings like SU-8.