Substrate removal for ultra efficient silicon heater-modulators

2017 IEEE Optical Interconnects Conference (OI) Pub Date : 2017-06-01 DOI:10.1109/OIC.2017.7965508

N. Martinez, C. DeRose, R. Jarecki, A. Starbuck, A. Pomerene, D. Trotter, A. Lentine

引用次数: 3

Abstract

We present our experimental results of ultra efficient (up to 2.16 nm/mW) thermally tunable modulators with n-type heaters and the Si substrate removed. To our knowledge, this is the most efficient thermally tunable modulator demonstrated at 1550nm to date. We include results of externally heated modulators with commensurate performance enhancements through substrate removal.

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超高效硅加热调制器的衬底去除

我们展示了去除Si衬底的n型加热器的超高效(高达2.16 nm/mW)热可调调制器的实验结果。据我们所知，这是迄今为止在1550nm下展示的最有效的热可调调制器。我们包括通过衬底去除具有相应性能增强的外部加热调制器的结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2017 IEEE Optical Interconnects Conference (OI)

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