The method of lines for the analysis of mechanical structures

Abstract

In this contribution it is shown how the Method of Lines (MoL), a semi-analytical numerical method, can be used for the analysis for mechanical structures. The Method of Lines discretizes the problem in two dimensions, in the remaining direction an analytical solution is taken. This is extremely advantageous for the analysis of cascaded or finite periodic structures. Mechanical structures with a finite periodicities are e.g. acoustic mirrors for bulk acoustic wave (BAW) resonators. Those mirrors, used to isolate the vibrating structure from the substrate, consist of an alternating series of low- and high-impedance acoustic layers to absorb the mechanical movement. Results for the eigenmodes of the mechanical structures as well as the behavior of a layer stack are shown.