On the Feasibility of Performing Line Scale Measurments on a High Accuracy Coordinate Measuring Machine

Wei Ren, Roy E. Sundahl, T. Doiron
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Abstract

The NIST Linescale interferometer has been used to calibrate line standards for over 50 years. The last substantial upgrade of the instrument was over 20 years ago. The system, which is still very accurate, has become increasingly difficult to support. In this paper we report on a new calibration system being developed for line standards that uses one of the NIST high accuracy M-48 coordinate measuring machine. The talk will discuss the primary limitations of both the M-48 and the linescale, the new line finding microscope, system alignment and measurement process, software control system and data analysis algorithm. Finally performance data on the current version of the system comparing to other systems and algorithms will be presented. System improvements will be discussed at end also.
在高精度三坐标测量机上进行线标度测量的可行性研究
NIST线刻度干涉仪已用于校准线标准超过50年。该仪器的最后一次重大升级是在20多年前。这个仍然非常精确的系统已经变得越来越难以支持。本文介绍了一种利用NIST高精度M-48三坐标测量机研制的线标标定系统。讲座将讨论M-48和线尺的主要局限性,新的寻线显微镜,系统对准和测量过程,软件控制系统和数据分析算法。最后,将当前版本系统的性能数据与其他系统和算法进行比较。系统改进也将在最后讨论。
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