Contribution of Crystal Lattice Defects to Polycrystalline SiC Corrosion

S. Kondo, Kotaro Seki, Y. Maeda, Hao Yu, Kazuhiro Fukami, R. Kasada
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Abstract

The relationship between lattice defects and the corrosion of SiC irradiated with heavy ions at 400 °C and 800 °C was investigated using electrochemistry and electron spin resonance spectroscopy. An immersion test in high-pressure hot water was also used to evaluate surface recession. The corrosion current increased monotonically with dangling-bond (DB) density, indicating that DBs were the primary reaction sites. Further, the surface recession rate in hot water increased exponentially with increasing DB density. The dense DBs were found to be surrounded by distorted lattices. These findings indicated that SiC dissolution was further accelerated by the accumulated lattice distortion.
晶格缺陷对多晶SiC腐蚀的贡献
利用电化学和电子自旋共振谱研究了400℃和800℃重离子辐照SiC的晶格缺陷与腐蚀的关系。在高压热水中浸泡试验也用于评估表面衰退。腐蚀电流随悬键密度单调增加,表明悬键是主要反应部位。此外,随着DB密度的增加,热水中的表面衰退率呈指数增长。致密的脑屏障被扭曲的晶格包围。这些结果表明,累积的晶格畸变进一步加速了SiC的溶解。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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