An Electro-Aerodynamic Solid-State Fan and Cooling System

Abstract

A miniature solid-state fan has been developed. The solid-state fan blows air like a typical rotary fan but without any moving parts. It uses the principle of electro- aerodynamic pumping. These fans have been shown to produce a pressure head of up to 42 Pa. Operable fans as small as 1 mm thick have been demonstrated. These fans are intended to provide air flow to cool a 20 Watt chip in an integrated, chip-scale cooling system or to replace the blower in a laptop cooling system.