Multi-Objective Optimization of all-Dielectric Metasurfaces Using 2D RCWA Algorithm For Sensing Applications

Abstract

We propose an evolutionary algorithm-based multi-objective optimization method of all-dielectric metasurfaces for sensing using Rigorous-Coupled-Wave-Analysis (RCWA). To demonstrate, we optimized a Si nano-dimer. Simulation results show a Fano resonance with a quality factor of 53570 at 1500nm wavelength and sensitivity of 292 nm/RIU.