Polymer MEMS fabrication process for system-on-chip self-assembled millimeter-wave antennas

Abstract

A novel micro-electro-mechanical systems (MEMS) fabrication process is developed to create self-assembled on-chip high efficiency antennas. A self-assembly technique is used to create out-of-plane on-chip antennas with excellent radiation efficiency on low resistivity substrates. This paper discusses on the fabrication of a monopole antenna and the measurement of the antenna's radiation pattern characteristics. To achieve improved isolation and reduced loss, a thick dielectric layer was placed under the antennas and the transmission lines. The measurement shows maximum realized gain of -2.5 dBi at 66 GHz.