Dielectric and semiconductor membranes as support for microwave circuits

Abstract

A 1.5 /spl mu/m thin SiO/sub 2//Si/sub 3/N/sub 4//SiO/sub 2/ membrane was manufactured on <100> Silicon substrate. Also a 10-20 /spl mu/m thin GaAs membrane was manufactured using a new etching solution. Both types of membranes are destined to be used as support for microwave circuits; this has as effect a major improvement of circuits' performances.