Gas evolution of nickel, stainless steel 316 and titanium anodes in vacuum sealed tubes

J. Parson, J. Dickens, J. Walter, A. Neuber, M. Kristiansen
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引用次数: 13

Abstract

This paper presents a study on gas evolution of three different anode materials in vacuum sealed tubes under UHV conditions. The experimental apparatus consists of a high-power microwave (HPM) virtual-cathode oscillator (vircator) driven by a 200 ns, 80 J, 225 kV low-impedance Marx Generator. Plasma expansion due to explosive electron field emission has shown to lower gap impedance, spoil consistent low vacuum levels, and cut-off microwave radiation. The anode materials compared are nickel 201L (Ni201L), stainless steel 316L (SS316L) and grade-1 titanium (TiG1); with the cathode material being aluminum. The anodes were cleaned by the following method: rough polishing followed by electro-polishing, a ten minute microwave argon / 10% oxygen plasma cleaning process (ArO2) and finally, a 72 hour in situ bake-out at 300°C. Outgassing characteristics of each anode material are presented and compared.
真空密封管中镍、不锈钢、316和钛阳极的气体演化
本文研究了三种不同阳极材料在特高压条件下真空密封管内的气体演化。实验装置由200 ns、80 J、225 kV低阻抗马克思发生器驱动的高功率微波虚阴极振荡器组成。爆炸电子场发射引起的等离子体膨胀降低了间隙阻抗,破坏了一贯的低真空水平,并切断了微波辐射。对比阳极材料有镍201L (Ni201L)、不锈钢316L (SS316L)和一级钛(TiG1);正极材料是铝。阳极的清洗方法如下:先进行粗抛光,然后进行电抛光,然后进行10分钟的微波氩气/ 10%氧等离子体清洗(ArO2),最后在300℃下进行72小时的原位烘烤。介绍并比较了各种阳极材料的放气特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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