Novel IrOx/SiO2/W cross-point memory for lysyl-oxidase-like-2 (LOXL2) breast cancer biomarker detection

Abstract

Novel IrOx/SiO2/W 10x10 µm² cross-point structure has been introduced for high-density resistive memory as well as urea/LOXL2 sensing for the first time. The Ir⁰/Ir³⁺/Ir⁴⁺ oxidation states are confirmed by X-ray photo-electron spectroscopy (XPS) analysis. A dc endurance of > 1000 cycles at low current compliance (CC) of 200 nA and long program/erase (P/E) endurance of >10¹⁰ cycles with a small pulse width of 100 ns are obtained. Super-nernstian pH sensitivity of 140 mV/pH with 99.45% linearity, and LOXL2 with a low concentration of 1 pM through porous IrOx membrane are obtained.