The development of security system and visual service support software for on-line diagnostics

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) Pub Date : 2001-10-08 DOI:10.1109/ISSM.2001.962911

M. Inaba, T. Aizono, K. Sonobe, H. Fukube, T. Iizumi, J. Arima, Y. Usami

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引用次数: 8

Abstract

Hitachi's CD-SEM achieves the highest tool availability in the industry. However, efforts to further our performance are continuously underway. The proposed on-line diagnostics system can allow senior technical staff to monitor and investigate tool status by connecting the equipment supplier and the device manufacturer sites through the Internet. The advanced security system ensures confidentiality by firewalls, digital certification, and advanced encryption algorithms to protect device manufacturer data from unauthorized access. Service support software, called DDS (defective part diagnosis support system), will analyze the status of mechanical, evacuation, and optical systems. Its advanced overlay function on a timing chart identifies failed components in the tool and allows on-site or remote personnel to predict potential failures prior to their occurrence. Examples of application shows that the proposed system is expected to reduce repair time, improve availability and lower cost of ownership.

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在线诊断安全系统及可视化服务支持软件的开发

日立的CD-SEM实现了业内最高的工具可用性。然而，我们仍在不断努力提高我们的业绩。提出的在线诊断系统可以让高级技术人员通过互联网连接设备供应商和设备制造商的站点来监控和调查工具状态。先进的安全系统通过防火墙、数字认证和先进的加密算法确保机密性，保护设备制造商的数据不被未经授权的访问。服务支持软件，称为DDS(缺陷部件诊断支持系统)，将分析机械，疏散和光学系统的状态。其先进的时序图叠加功能可识别工具中的故障部件，并允许现场或远程人员在故障发生之前预测潜在的故障。应用实例表明，该系统有望减少维修时间，提高可用性，降低拥有成本。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)

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