Coplanar waveguide modeling based on scattering parameter measurements

Abstract

Presents a method for verification of important coplanar waveguide parameters. It employs a simplex optimization algorithm for transmission line model identification from on-wafer S-parameter measurements in a wide frequency range. The method was implemented in a control program for automated S-parameter measurements and applied for characterization of micromachined AlGaAs and InGaP coplanar waveguides.