High power ultra-short pulse UV laser system

Junewen Chen, Kai-Chun Chung, Jung-Chao Chen, Shu-Yuan Lin, Chi‐Feng Chen
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Abstract

We have developed a terawatts high intensity, sub-hundred femtosecond ultra-short pulses, 248.6 nm ultraviolet laser systems, with dye seed laser in blue-green regime, amplified in the multi-stage dye amplifiers and then frequency doubled and finally amplified with multiple-passes KrF amplifier. We have characterized the system performances, the amplified interaction volume, the amplified spontaneous emission optimization, the Excimer amplifier and the system merits.
大功率超短脉冲紫外激光系统
我们开发了一种太瓦高强度、百飞秒以下超短脉冲、248.6 nm紫外激光系统,采用染料种子激光蓝绿状态,在多级染料放大器中放大,然后倍频,最后用多道KrF放大器放大。描述了系统的性能、放大的相互作用体积、放大的自发辐射优化、准分子放大器和系统的优点。
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