Development of a Compact and Cost Effective MSL System Based on a Compliant Nanomanipulator

Abstract

This paper proposes a compact and cost-effective MSL (Micro Stereo Lithography) prototyping system. A self-developed compliant XY nanomanipulating stage is responsible for the fabrication quality in one layer. And a blu-ray LED laser module is utilized as a cost-effective light source. The experimental results show that the MSL prototyping system is capable of achieving ∼ 2 μm cured width for circular patterns.