Room-temperature bonding of organic films using ultrathin Au intermediate layers for organic integrated optical devices

Abstract

Room-temperature bonding of organic films in ambient air was demonstrated by SAB (surface activated bonding) using ultrathin Au intermediate layers. Furthermore, vacuum sealing of organic film and Si substrate with cavities were performed by SAB using ultrathin Au intermediate layers. The membrane on the cavity had the deflection even18 days after bonding, meaning that vacuum sealing was achieved by ultrathin (15 nm) Au film with adhesion layers.