Bandwidth Improvement Methods In Acoustically-Coupled Thin Film BAW Devices

Abstract

In this paper, the results of a stacked crystal filter (SCF) are presented. It is shown that the bandwidth of the SCF can be designed by choice of electrode materials, device dimensions and use of external components such as inductors. This paper also discusses the fabrication of SCF along with the device layouts. A single stage and a two-stage SCF are designed and it is shown that the bandwidth of two-stage can only be increased if the inductor is connected between stages