Superconducting Microbridges for large area single photon detectors

2022 IEEE 15th Workshop on Low Temperature Electronics (WOLTE) Pub Date : 2022-06-06 DOI:10.1109/WOLTE55422.2022.9882683

D. Salvoni, L. Parlato, Chianese Federico, M. Ejrnaes, C. Bruscino, P. Ercolano, R. Satariano, C. Cirillo, A. Cassinese, Attanasio Carmine, G. Pepe

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Abstract

In this work we discuss the result of the fabrication with photolithography process of microstrips made of MoSi/Al superconducting films, with different widths and patterns suitable for single photon detection. The different designs presented are adopted to increase the sensitive area.

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用于大面积单光子探测器的超导微桥

在本工作中，我们讨论了用光刻工艺制备适合单光子探测的不同宽度和图案的MoSi/Al超导薄膜微带的结果。采用了不同的设计来增加敏感面积。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2022 IEEE 15th Workshop on Low Temperature Electronics (WOLTE)

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