Comparative study of bandpass filters manufactured by different deposition technologies

A. Moreau, T. Begou, F. Lemarchand, F. Lemarquis, K. Mathieu, et J. Lumeau
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Abstract

We perform a comparative study of the performances of thin-film bandpass filters fabricated using plasma assisted reactive magnetron sputtering and electron beam deposition. Design, fabrication and characterization of such filters are presented.
不同沉积工艺制备的带通滤波器的比较研究
对等离子体辅助反应磁控溅射和电子束沉积制备的薄膜带通滤波器的性能进行了比较研究。介绍了这种滤波器的设计、制造和特性。
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