Zn Doping Effect on Surface Morphology of Metamorphic InAs on GaAs Grown by MOVPE

Abstract

We investigate the effect of Zn doping on surface roughness during InAs growth on GaAs substrate by metal organic vapor phase epitaxy (MOVPE). The surface roughness was measured by atomic force microscope (AFM) and scanning electron microscope (SEM). We confirmed the Zn doping was effective to improve the surface roughness.