Intraocular Pressure Sensor Design

Abstract

Ocular pressure measurement is of great importance when we speak of glaucoma detection. When detected on time, blindness can be avoided on patients. The ocular pressure measurement is made by a MEMS device which is made basically of two parallel silicon plates with a diameter no longer than 800 microns, separated by a dielectric (in this case it will be vacuum) with estimated width of 5 microns. The pressure microsensor behaves in an adequate matter for our seaked goal, given that for small variations in pressure (Hg mm. units for human eye's case), there is also a change in the plate's deflection that can be measured