Layer-by-layer deposition of transparent AZO coatings on polymer surfaces in a DС magnetron discharge

Abstract

The method of layer-by-layer deposition of transparent conductive AZO coatings on transparent polymer substrates (acrylic and polycarbonate) from two metal targets was presented. For the deposition of the ZnO layer, a metallic Zn target was sputtered in a mixture of working gases Ar and O2 (2:1). The alloying layer was prepared by a metallic Al target sputtering in Ar gas. The required ratio of the dopant in the ZnO:Al structure was achieved by varying cycle times of Al and ZnO layer deposition. The samples showed surface resistance as low as Rsmin ~ 10 Ω/□ and resistivity as low as ρmin ~ 3∙10-6 Ω∙m coupled with a high level of optical transparency.